The SAES Getters Group, world leader in getter technology for high vacuum applications, recognizes in SST International’s Model 3150 MEMS sealing furnace the best performing equipment for integration with its proprietary getter thin film PageLid®®, designed to maintain vacuum or contamination-free environments in discrete MEMS hermetic packages.

Leveraging more than 40 years of expertise in microelectronic package assembly, SST International designs and builds high vacuum furnaces for high-reliability MEMS hermetic sealing, ensuring very low gas pressures inside the packages. As a result of continuous process optimization, SST recently upgraded the Model 3150 High Vacuum Furnace to offer MEMS manufacturers the option to separate the critical steps of getter activation and hermetic sealing of discrete MEMS packages, thus preserving the unaltered vacuum absorbing capacity of the getter material in the packages. Before package sealing, a proprietary high temperature process is devoted to getter activation. The separation of this process from the sealing steps permits the ideal temperature required for getter activation, which is higher than sealing temperatures (typically in the range of 250-300 °C). The getter, fully activated by means of this dedicated process and maintained in the best operational conditions, ensures long-term stability of the package vacuum or inert gas atmosphere and improves MEMS lifetime and performance.

PageLid is SAES Getters’ advanced technological solution for the integration of a getter thin film into hermetically sealed discrete packages of MEMS. Avoiding any welding of bulk getters in discrete miniaturized hermetic packages, PageLid is a metallic, ceramic or glass lid bearing customer-defined patterns of getter thin films. The Page® film deposited on PageLid consists of SAES' patented zirconium alloy, whose composition and morphology are optimized to maximize sorption performance and reduce activation temperature. Through the chemical sorption of active gases, including H2O, O2, CO, CO2, N2 and H2, the Page film dramatically reduces out-gassing from the lid material area, while its absorption capacity can be customized to ensure the device designed lifetime.

"SAES Getters is extremely pleased to welcome this perfect integration between its PageLid and SST’s Model 3150 furnace”, says Marco Moraja, Getters for MEMS Business Development Area Manager at the SAES Getters Group. “This equipment is fully compatible with the activation and operation conditions of our getters, as testified already by the major discrete MEMS package manufacturers worldwide, who select SAES-SST integrated solutions to boost their product performance”, concluded Mr. Moraja.

SST International’s President, David Muhs adds: “SST’s engineering team recognized the stringent process requirements for optimum getter activation and MEMS package performance and developed solutions to address these needs. We work closely with MEMS packaging engineers and SAES Getters Group to insure that each different packaging need is address with the best combination of materials, equipment and processes.”

About the SAES Getters Group
Pioneering the development of getter technology, the SAES Getters Group is the world leader in a variety of scientific and industrial applications where stringent vacuum conditions or ultra-pure gases are required. For 60 years its getter solutions have been supporting innovation in the information display and lamp industries, in technologies spanning from large vacuum power tubes to miniaturized silicon-based micromechanical devices, as well as in sophisticated high vacuum systems and in vacuum thermal insulation. The Group also holds a leading position in ultra pure gas handling for the semiconductor and other hi-tech markets. Starting in 2004, by leveraging the core competencies in special metallurgy and materials science, the SAES Getters Group has expanded its business into advanced material markets, with the introduction of new optical crystal, shape memory alloy and metalorganic precursor product lines. A total production capacity distributed at 9 manufacturing plants across 3 continents, a worldwide-based sales & service network, over 800 employees allow the Group to combine multicultural skills and expertise to form a truly global enterprise. SAES Getters is headquartered in the Milan area (Italy) and has been listed on the Italian Stock Exchange Market, STAR segment, since 1986. www.saesgetters.com

About SST International
Recognized worldwide as a leader in advanced packaging technology, SST International continues to build on a 40 year tradition of developing innovative equipment and process solutions for microelectronic manufacturers. SST manufactures vacuum and pressure furnaces which permit the creation of void-free solder joints without flux. Applications include eutectic die attach, hermetic package and feed-thru sealing, lead-free soldering, wafer bonding, precise optical component soldering, and high vacuum packaging of discrete MEMS packages. SST’s systems range from table-top stations to semi-automatic production furnaces and fully automatic in-line solutions. SST’s dedication to total customer support includes the design and fabrication of system-related production fixtures, process development services, and worldwide system installation and support.
SST’s network of sales and service organizations include offices in 15 countries, with manufacturing and headquarters located in the Los Angeles, California area (USA). www.sstinternational.com