March Plasma Systems released an improved version of its highly successful AP-1000 plasma system for high-volume plasma processing of semiconductor and microelectronics devices. The current AP-1000 system already enjoys a large installed base at customer sites worldwide, with over 200 systems currently in the field. The redesigned version provides the same production-proven plasma technology and performance in a smaller, more compact and easier-to-service design.

"We have improved the new AP-1000 system to consume 24% less actual floor space than before," said Peter Bierhuis, President of March, "and 45% less effective floor space when you include all of the required maintenance areas. We have also moved key components to make them more accessible and easier to service. An added benefit for large-scale manufacturing facilities is that more AP-1000 systems can be placed side-by-side in a smaller area because now the chassis is smaller, there are no required maintenance areas at the sides of the system, and the plasma chamber door has been redesigned." www.marchplasma.com